Resolutions up to 0.04µinch
(0.001 micron)
Accuracy up to 5µinch
(0.127 micron) per inch traveled
Velocities
up to 100 Inch (254 cm) per second
Distance
of travel up
to 9 feet (244cm)
Servo update rates
of 40KHz |
|
Resolutions up to 0.09µinch
(0.002 micron)
Accuracy up to 5µinch
(0.127 micron) per inch traveled
Velocities
up to 50 Inch (127 cm) per second
Orthagalogy
of X to Y axis better than 2 arc seconds
Distance
of travel up to 4 feet (140cm) per
axis
Servo update rates of 20KHz |
|
Resolutions (per radius
inch) 0.02µinch (0.02µradian)
Rotary positional accuracy
to 1⁄4 arc second
Velocities
up to 100 rpm (600 Radians)
High stiffness
air bearing stage with laser encoder
feedback |
