Pan and Tilt Gimbals

Axsys pan and tilt gimbals are generally used to position sensors or mirrors to track objects with high precision.

Accuracy:	Up to 30 arc-seconds (0.008° or 150 µrad)
Repeatability:	Up to 10 arc-seconds (0.003° or 50 µrad)
Payload Capacity:	Up to 100 lbs (45 kg)
Slew Rate:	Up to 60 radians per second (570 rpm)
Acceleration:	2,000 rad/s2
Tracking Rate:	Up to 100 microradians per second (0.006°/s)
Vibration:	Up to 10 grms random
Temperature:	-40°C to +90°C

Scanning Systems

Axsys scanning systems are used for imaging or to redirect a laser beam at high speed.

Accuracy:	< 5 µm
Repeatability:	< 0.1 µm
Scan Fields:	Up to 650 mm (greater upon request)
Scan Rates:	Up to 2,100 scans/sec (greater upon request)
Wavelengths:	350–1,200 nm (multi-wavelength possible)
Duty Cycles:	50–95%
Spot Sizes:	10–150 µm (smaller upon request)

Stages

Stages are used in industrial applications where ultra-precise positioning is required, such as in semiconductor manufacturing.

Linear
Single Axis
Resolutions:	Up to 0.04 micro-inches (0.001 µm)
Accuracy:	Up to 5 micro-inches per inch traveled (99.9995%)
Velocities:	Up to 100 inches (2.5 m/s)
Distance:	Up to 9 feet (2.4 m) per second
Servo update:	40 kHz
Multiple Axis(X-Y)
Resolutions:	Up to 0.09 micro-inches (0.002 µm)
Accuracy:	Up to 5 micro-inches per inch traveled (99.9995%)
Velocities:	Up to 50 inches per second (1.3 m/s)
Orthogonality:	Better then 2 arc seconds (10 µrad)
Distance:	Up to 4 feet (1.2 m) per axis
Servo update:	20 kHz
Rotary
Resolutions:
Accuracy:	Rotary positional accuracy to 1/4 arc second (1 µrad)
Velocity:	Up to 100 rpms (600 Radians)
High Stiffness:	High stiffness air bearing stage with laser encoder feedback